双频容性耦合等离子体无碰撞电子反弹共振加热研究
Release Time:2019-03-13 Hits:
Indexed by: Conference Paper
Date of Publication: 2011-09-15
Page Number: 1-1
Key Words: 容性耦合等离子体;反弹共振加热;双探针;发射光谱
Release Time:2019-03-13 Hits:
Indexed by: Conference Paper
Date of Publication: 2011-09-15
Page Number: 1-1
Key Words: 容性耦合等离子体;反弹共振加热;双探针;发射光谱