Hits:
Indexed by:会议论文
Date of Publication:2011-09-15
Page Number:1-1
Key Words:容性耦合等离子体;反弹共振加热;双探针;发射光谱
Pre One:Polysilicon Prepared from SiCl4 by Atmospheric-Pressure Non-Thermal Plasma
Next One:A brief review of dual-frequency capacitively coupled discharges
