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Indexed by:期刊论文

Date of Publication:2010-04-19

Journal:VACUUM

Included Journals:SCIE、EI

Volume:84

Issue:9

Page Number:1118-1122

ISSN No.:0042-207X

Key Words:Plasma immersion ion implantation; PET; Charging effects; Plasma sheath

Abstract:The characteristics of sheath in a cylindrical Polyethylene terephthalate (PET) film for plasma immersion ion implantation (PIII) have been investigated numerically using a one-dimensional self-consistent fluid model. The time-dependent surface potential and the charge density accumulated on the inner surface of PET-film are obtained. The numerical results demonstrate that the charging effects lead to the reduction of surface potential during pulse on time, the implanted ions thus cannot reach the desirable energy. In order to diminish the influence of charging effects one can shorten the pulse fall time and thin the PET-film. (C) 2010 Elsevier Ltd. All rights reserved.