Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2010-03-01

Journal: REVIEW OF SCIENTIFIC INSTRUMENTS

Included Journals: EI、SCIE

Volume: 81

Issue: 3

ISSN: 0034-6748

Key Words: cyclotron resonance; electron density; high-frequency discharges; hydrogen; plasma density; plasma sources; plasma temperature

Abstract: Hybrid hydrogen plasma was formed by biasing 13.56 MHz radio-frequency (rf) power on a substrate immersed in 2.45 GHz microwave electron cyclotron resonance (ECR) plasma. The influences of the substrate configuration on plasma characteristics were investigated. With increasing rf self-bias voltage, electron temperature, T(e), increases obviously in the case of the single-electrode substrate, whereas a slight change in T(e) was observed with the double-electrode substrate condition. Electron density rises almost with a same magnitude under both two substrate conditions. It exhibited that electron energy and density in ECR-rf hybrid mode could be adjusted independently by controlling rf discharge with favorable substrate configurations.