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王友年
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Paper Publications
[301]李雪春, 王友年.EFFECT OF APPLIED PULSE BIAS ON SHEATH CHARACTERISTICS IN PLASMA SOURCE ION IMPLANTATION WITH DIE...[A],2011
[302]宋远红, 王友年.Effect of pulse duration on characteristics of modulated radio-frequency SiH4/N2/NH3 discharges[J],Thin Solid Films,2011,519(20):6951-6954
[303]宋远红, 王友年.Two dimensional fluid simulation in capacitively coupled silane discharges[A],2011,28-28
[304]戴忠玲, 王友年.Study on Feature Profile Evolution for Chlorine Etching of Silicon in a RF Biased Sheath[A],2011
[305]戴忠玲, 王友年.Simulation of ion behavior in a photoresist trench during metal etching driven by a radio-frequen...[A],2011
[306]戴忠玲, 王友年.Study on Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a...[J],CHIN.PHYS.LETT,2011,28(10):75202-75202
[307]陆文琪, 李小松, 王友年.Spatially resolved measurements of ion density and electron temperature[J],J. Vac. Sci. Technol. A,2011,29(1):11006-11006
[308]李雪春, 丁振峰, 王友年.Numerical Simulation of Pulse-modulated Radio-frequency Atmospheric Pressure Dielectric Barrier D...[A],2011
[309]李雪春, 丁振峰, 王友年.Effect of duty cycle on the characteristics of pulse-modulated radio-frequency atmospheric pressu...[A],2011
[310]Jiang, Xiang-Zhan, Liu, Yong-Xin, Yang, Shuo, Lu, Wen-Qi, Bi, Zhen-Hua, Li, Xiao-Song, Wang, You-Nian, XZ (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Spatially resolved measurements of ion density and electron temperature in a dual-frequency cap...[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2011,29(1)
total420 31/42
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