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论文类型：期刊论文

发表时间：2011-09-01

发表刊物：Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010)

收录刊物：SCIE、EI、CPCI-S、Scopus

卷号：11

期号：5

页面范围：S131-S134

ISSN号：1567-1739

关键字：Dust removing; Annular electrodes; Periodical potential wells

摘要：The behavior of dust particles in capacitively coupled plasmas with annular electrodes is investigated. With the application of modulated signals on the annular electrodes, the periodical potential wells can be produced and it can play an effective role on dust removing. We pay our attention to the relations between the dust removal efficiency and the modulated signals. It is presented that by increasing the applied voltage or the applied frequency on the annular electrodes, the dust removal efficiency increases significantly. It is also shown that with the increase of the dust diameter, the dust removal efficiency decreases. (C) 2011 Elsevier B. V. All rights reserved.