王友年
开通时间:..
最后更新时间:..
点击次数:
论文类型:期刊论文
发表时间:2011-01-01
发表刊物:JOURNAL OF APPLIED PHYSICS
卷号:109
期号:1
页面范围:13308-13308
上一条:Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon
下一条:EFFECT OF APPLIED PULSE BIAS ON SHEATH CHARACTERISTICS IN PLASMA SOURCE ION IMPLANTATION WITH DIELECTRIC SUBSTRATES