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论文类型：期刊论文
发表时间：2014-01-01
发表刊物：Applied Surface Science 313 (2014) 911–917
卷号：313
期号：6
页面范围：911-917
上一条：Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O-2/CF4 discharges
下一条：Analyzing nonlocal effects in the plasmon spectra of a metal slab by the Greens function technique for hydrodynamic model
