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    王友年

    • 教授     博士生导师   硕士生导师
    • 性别:男
    • 毕业院校:大连工学院
    • 学位:硕士
    • 所在单位:物理学院
    • 学科:等离子体物理
    • 办公地点:大连理工大学物理系楼306
    • 联系方式:0411-84707307
    • 电子邮箱:ynwang@dlut.edu.cn

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    Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O-2/CF4 discharges

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    论文类型:期刊论文

    发表时间:2014-01-07

    发表刊物:JOURNAL OF APPLIED PHYSICS

    收录刊物:SCIE、EI、Scopus

    卷号:115

    期号:1

    ISSN号:0021-8979

    摘要:The electron density and ion energy distribution (IED) are investigated in low-pressure dual-frequency capacitively coupled Ar/CF4 (90%/10%) and Ar/O-2/CF4 (80%/10%/10%) plasmas. The relations between controllable parameters, such as high-frequency (HF) power, low-frequency (LF) power and gas pressure, and plasma parameters, such as electron density and IEDs, are studied in detail by utilizing a floating hairpin probe and an energy resolved quadrupole mass spectrometer, respectively. In our experiment, the electron density is mainly determined by the HF power and slightly influenced by the LF power. With increasing gas pressure, the electron density first goes up rapidly to a maximum value and then decreases at various HF and LF powers. The HF power also plays a considerable role in affecting the IEDs under certain conditions and the ion energy independently controlled by the LF source is discussed here. For clarity, some numerical results obtained from a two-dimensional fluid model are presented. (C) 2014 AIP Publishing LLC.