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论文类型：期刊论文

发表时间：2013-06-13

发表刊物：JOURNAL OF PHYSICS D-APPLIED PHYSICS

收录刊物：SCIE、EI、Scopus

卷号：46

期号：23

ISSN号：0022-3727

摘要：Ion energy distributions (IEDs) of Ar+ and O-2(+) bombarding the grounded electrode are measured by an energy resolved quadrupole mass spectrometer in a dual-frequency capacitively coupled plasma (DF-CCP) operated in a gas mixture of Ar and O-2 (90%/10%). The effects of external discharge parameters, such as the frequency and power of the low frequency (LF) source and the gas pressure, on the IEDs are investigated in detail. With the increase in the LF power, the high-energy peak shifts towards the high-energy region and the energy width Delta E between high- and low-energy peaks in the IEDs also increases. However, the increase in the LF frequency leads to the shift of the high-energy peak towards the low-energy region as well as a narrow energy width Delta E. The increase in the gas pressure results in the bimodal structure being unobvious because of intensive momentum transfer and charge exchange collisions between ions and background molecules. In addition, the distinctions between Ar+ and O-2(+) IEDs are also discussed. Finally, some experimental results are compared with numerical ones obtained from the particle-in-cell/Monte Carlo (PIC/MC) method and both results are in general agreement.