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脉冲调制射频容性耦合反应性气体放电的机理研究

Release Time:2016-08-09  Hits:

Leading Scientist: SONG Yuan-Hong

Institution: 物理学院

Project Source: 国家自然科学基金项目

Project Level: National level

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11275038

Date of Project Approval: 2012-09-25

Scheduled Completion Time: 2016-12-31

Date of Project Initiation: 2013-01-01

Date of Project Completion: 2016-12-31

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