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SONG Yuan-Hong

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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates

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Wen, Ying-Ying, Zhang, Yu-Ru, Jiang, Ge, Song, Yuan-Hong, Wang, You-Nian, YR (reprint author), Dalian Univ Technol, Sch Phys, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China..Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate[J],AIP ADVANCES,2019,9(5)
胡艳婷, 王友年, 宋远红, 张钰如.相位角对容性耦合电非对称放电特性的影响[J],物理学报,2018,67(22):288-300
Zhang, Yu-Ru, Hu, Yan-Ting, Gao, Fei, Song, Yuan-Hong, Wang, You-Nian, YN (reprint author), Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China..Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple harmonics: operating in the very high frequency regime[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(5)
Liu, Xiang-Mei, Song, Yuan-Hong, Jiang, Wei, Jia, Wen-Zhu, XM (reprint author), Qiqihar Univ, Sch Sci, Qiqihar 161006, Peoples R China..Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation[J],CHINESE PHYSICS LETTERS,2018,35(4)
戴忠玲, 董婉, 宋远红, 王友年.Effect of ion bombardment time on the profile of atomic layer etching[A],2018
董婉, 宋远红, 戴忠玲, 王友年, 王喜凤.Effect of plasma uniformity on etching profiles[A],2018

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