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容性耦合等离子体准原子层刻蚀/沉积的多尺度混合模拟研究

Release Time:2019-10-11  Hits:

Leading Scientist: SONG Yuan-Hong

Project Participants: 戴忠玲,张莹莹

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11975067

Date of Project Approval: 2019-08-16

Scheduled Completion Time: 2023-12-31

Date of Project Initiation: 2020-01-01

Date of Project Completion: 2024-03-26

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