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容性耦合等离子体准原子层刻蚀/沉积的多尺度混合模拟研究

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Leading Scientist:SONG Yuan-Hong

Project Participants:daizhongling,zhangyingying

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:11975067

Date of Project Approval:2019-08-16

Scheduled completion time:2023-12-31

Date of Project Initiation:2020-01-01

Date of Project Completion:2024-03-26

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