Current position: Home >> Scientific Research >> Research Projects

裁剪波形电负性气体容性耦合放电机理的混合模拟和实验验证

Release Time:2016-10-10  Hits:

Leading Scientist: SONG Yuan-Hong

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11675036

Date of Project Approval: 2016-08-17

Scheduled Completion Time: 2020-12-31

Date of Project Initiation: 2017-01-01

Prev One:容性耦合等离子体准原子层刻蚀/沉积的多尺度混合模拟研究

Next One:燃烧等离子体约束改进型运行模式