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非对称射频容性耦合放电电子动力学及加热机理模拟研究和实验验证

Release Time:2020-10-10  Hits:

Leading Scientist: SONG Yuan-Hong

Project Participants: Kai Zhao,戴忠玲,张莹莹

Project Source: 国家自然科学基金项目

Sub-Class of Project: 重点国际合作研究项目

Status: 在研

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 12020101005

Date of Project Approval: 2020-09-18

Scheduled Completion Time: 2025-12-31

Date of Project Initiation: 2021-01-01

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