Current position: Home >> Scientific Research >> Paper Publications

低气压射频及甚高频容性耦和等离子体源的发展趋势及相关物理问题

Release Time:2019-03-10  Hits:

Indexed by: Conference Paper

Date of Publication: 2011-08-08

Page Number: 7-7

Prev One:Energy dissipation of ion beam in two-component plasma in the presence of laser irradiation

Next One:低气压射频及甚高频容性耦合等离子体源的发展趋势及相关物理问题