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Indexed by:期刊论文

Date of Publication:2008-02-01

Journal:PLASMA SCIENCE & TECHNOLOGY

Included Journals:SCIE、EI、CSCD

Volume:10

Issue:1

Page Number:57-60

ISSN No.:1009-0630

Key Words:capacitively coupled plasmas; dual frequency; hydrodynamics; sheath

Abstract:A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.