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论文类型：期刊论文

发表时间：2018-04-01

发表刊物：CHINESE PHYSICS LETTERS

收录刊物：SCIE

卷号：35

期号：4

ISSN号：0256-307X

摘要：A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the gamma regime (secondary electrons emission is responsible for the significant ionization) to the alpha regime (sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature. The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.