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论文类型：期刊论文

发表时间：2011-08-01

发表刊物：PHYSICS OF PLASMAS

收录刊物：SCIE、EI

卷号：18

期号：8

ISSN号：1070-664X

摘要：A two-dimensional (2D) self-consistent fluid model is developed to describe the formation, subsequent growth, transport, and charging mechanisms of nanoparticles in a capacitively coupled silane discharge applied by two very high frequency (VHF) sources with phase shift. In this discharge process, large anions are produced by a series of chemical reactions of anions with silane molecules, while the lower limit of the initial nanoparticles are taken as large anions (Si12H25- and Si12H24-) to directly link the coagulation module with the nucleation module. And then, by using the coagulation module, the particle number density quickly decreases over several orders of magnitude, whereas the particle size strongly increases. We investigate in particular the growth of the nanoparticles ranging in size from similar to 1 to 50 nm in coagulation processes. The influences of controlled phase shifts between VHF (50 MHz) voltages on the electron density, electron temperature, nanoparticle uniformity, and deposition rate, are carefully studied. It is found from our simulation that the plasma density and nanoparticle density become center high and more uniform as the phase shift increases from 0 to 180 degrees. Moreover, the role of phase-shift control in the silane discharge diluted with hydrogen gas is also discussed. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3626544]