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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：女
毕业院校：大连理工大学
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：物理学院305
联系方式：0411-84707939
电子邮箱：songyh@dlut.edu.cn
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Frequency matching effects on characteristics of bulk plasmas and sheaths for dual-frequency capacitively coupled argon discharges: One-dimensional fluid simulation
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论文类型：期刊论文
发表时间：2008-02-01
发表刊物：PLASMA SCIENCE & TECHNOLOGY
收录刊物：SCIE、EI、CSCD
卷号：10
期号：1
页面范围：57-60
ISSN号：1009-0630
关键字：capacitively coupled plasmas; dual frequency; hydrodynamics; sheath
摘要：A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.