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SiC MOS器件近界面氧化物缺陷与阈值电压漂移抑制技术研究

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Leading Scientist:Dejun WANG

Project Participants:Qin Fuwen,liangdacheng

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:61874017

Date of Project Approval:2018-08-16

Scheduled completion time:2022-12-31

Date of Project Initiation:2019-01-01

Date of Project Completion:2023-03-31

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