氢氮等离子体表面预处理改善SiO2/SiC界面特性
Release Time:2019-03-12 Hits:
Indexed by: Conference Paper
Date of Publication: 2015-10-30
Page Number: 118-119
Key Words: SiC半导体;SiO2/SiC;界面态密度;表面预处理;表面态
Release Time:2019-03-12 Hits:
Indexed by: Conference Paper
Date of Publication: 2015-10-30
Page Number: 118-119
Key Words: SiC半导体;SiO2/SiC;界面态密度;表面预处理;表面态