Chemical and electronic passivation of 4H-SiC surface by hydrogen-nitrogen mixed plasma (vol 104, 202101, 2014)
Release Time:2019-10-10 Hits:
Indexed by: Journal Article
Date of Publication: 2014-06-30
Journal: APPLIED PHYSICS LETTERS
Included Journals: SCIE
Volume: 104
Issue: 26
ISSN: 0003-6951