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立方GaN结晶薄膜生长中的ECR等离子体

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Date of Publication:2022-10-06

Journal:2000年中国材料研讨会

Affiliation of Author(s):电子信息与电气工程学部

Page Number:4

Note:新增回溯数据

Pre One:等离子体清洗GaAs和Al2O3衬底的RHEED图像分析

Next One:线形同轴耦合微波等离子体诊断及硅薄膜制备
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