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一种β－碳化硅薄膜的制备方法

Release Time:2022-10-20  Hits:

First Author: Jiming Bian

Disigner of the Invention: 张志坤,毕凯峰,刘艳红,刘维峰,Qin Fuwen

Institution: 物理学院

Application Number: CN103346073A

Authorization Number: CN201310293452.9

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