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DBD-HWCVD 沉积硅薄膜的研究

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Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:中国科技论文在线

Included Journals:PKU

Volume:13

Issue:3

Page Number:1-6

Pre One:低价硅衬底上多晶硅薄膜电池的一维数值

Next One:热丝化学气相沉积（HWCVD）中热丝直径对非晶硅薄膜沉积的影响
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