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Indexed by:期刊论文

Date of Publication:2007-12-01

Journal:MICROELECTRONICS JOURNAL

Included Journals:SCIE

Volume:38

Issue:12

Page Number:1191-1195

ISSN No.:0026-2692

Key Words:cathodic decomposition; cyclic voltammetry; porous InP

Abstract:Here we present a way to fabricate porous structure of InP by cathodic decomposition in a mixture of HCl and HNO(3). The direction of main pores was observed with a misorientation of similar to 8 degrees relative to [100]. Parallel side pores were grown on wall with a misorientation of similar to 54 degrees and similar to 43 degrees relative to [100] at -1.8 and -2.3 V, respectively. If the applied potential becomes more negative, the side pores interconnected is more obvious. Most of the electrons are concentrated on tips of the pores due to field enhancement effects, which results in the prior decomposition of InP at the tips of the pores in the process. The growth of the main pore is along with electric field direction. The formation of nonsymmetrical side pores is also discussed in the article. (C) 2007 Elsevier Ltd. All rights reserved.