Current position: Home >> Scientific Research >> Research Projects

高参数小型微波电子回旋共振等离子体源研究

Hits:

Leading Scientist:zfding

Supported by:自选课题

Status:结题

Supported by:兰州空间技术物理研究所

Nature of Project:横向

Date of Project Approval:2016-09-01

Scheduled completion time:2018-10-31

Date of Project Initiation:2017-04-13

Date of Project Completion:2020-06-30

Pre One:半导体先进封装工艺中射频偏置电压稳定性控制研究

Next One:大气压脉冲射频放电中斑图特性和斑图-辉光转化研究