Hits:
Leading Scientist:zfding
Project Participants:Wenqi Lu
Supported by:自选课题
Status:结题
Supported by:北京北方华创微电子装备有限公司
Nature of Project:横向
Date of Project Approval:2017-06-26
Scheduled completion time:2018-01-03
Date of Project Initiation:2017-07-03
Date of Project Completion:2020-06-30
