|
个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 国际磨粒技术学会（International Committee of Abrasive Technology, ICAT）委员，中国机械工程学会极端制造分会副主任、生产工程分会常务委员、微纳米制造技术分会常务委员，中国机械工程学会生产工程分会磨粒加工技术专业委员会副主任、切削加工专业委员会常委委员、精密工程与微纳技术专业委员会常委委员，中国机械工程学会特种加工分会超声加工技术委员会副主任，中国机械工程学会摩擦学分会微纳制造摩擦学专业委员会常务委员，中国机械工业金属切削刀具协会切削先进制造技术研究会常务理事、对外学术交流工作委员会副主任、切削先进制造技术研究会自动化加工技术与系统委员会副主任。
性别：男
毕业院校：西北工业大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械电子工程. 航空宇航制造工程
办公地点：机械工程学院7191
电子邮箱：kangrk@dlut.edu.cn
Nanoscale machinability and subsurface damage machined by CMP of soft-brittle CdZnTe crystals
点击次数：
论文类型：期刊论文
发表时间：2010-04-01
发表刊物：INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
收录刊物：SCIE、EI、Scopus
卷号：47
期号：9-12,SI
页面范围：1105-1112
ISSN号：0268-3768
关键字：Chemical mechanical polishing; Nanoscale machinability; Subsurface damage; Soft-brittle crystal; CdZnTe
摘要：Nanoscale machinability and subsurface damage induced by chemical mechanical polishing of three kinds of single crystals were investigated by nanoscratch and high-resolution transmission electron microscope (HRTEM). When the constant loads increase from 800 mu N to 3,200 mu N, the friction coefficient adjacently linearly increases from 0.199 to 0.292, due to the surface machining hardening effect. As the slight wiping on the surface of Cd(0.9)Zn(0.1)Te (111) leads to microscratches, the surface turns worse, resulting in the decrease and fluctuation of friction coefficient. Shear band appears on the surface of Cd(0.96)Zn(0.04)Te (111), while it disappears on the surfaces of Cd(0.96)Zn(0.04)Te (110) and Cd(0.9)Zn(0.1)Te (111), replacing with more obvious plastic flow pile-up, and showing the better nanoscale machinability. The cross-sectional HRTEM images show that after CMP the damage layer is 2 nm, and only consists of amorphous state, indicating the main material removal mode of chemical dissolving. While after lapping and mechanical polishing, wear track with width of about 50 nm is still left on the machined surface, and subsurface damage layer is about 10 nm.