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论文类型：期刊论文

发表时间：2014-06-01

发表刊物：SENSORS AND ACTUATORS A-PHYSICAL

收录刊物：SCIE、EI、Scopus

卷号：212

页面范围：93-101

ISSN号：0924-4247

关键字：Omnidirectional inertial switch; MEMS; Flexible electrode; Enhanced contact effect

摘要：A novel MEMS omnidirectional inertial switch was designed, simulated and fabricated. The switch is composed of three main parts, the proof mass, the axial flexible electrode and four radial flexible electrodes. It introduces the flexible electrodes to form a dual mass-spring system. The switch has omnidirectional sensitivities in a half sphere. When any acceleration, over the threshold value in radial on and axial direction, acts to the switch, the switch will turn on. Also, the switch has the enhanced contact effect. Dynamic simulation results based on FEM confirm that the contact effect is improved by this new design compared to that of traditional inertial switch. The contact duration is prolonged under the shock loading, and the bouncing effect is alleviated. The switch has a 6-layer structure, which is manufactured based on non-silicon surface micromachining technology. The tests have been done and the results coincide with that of the simulation. (c) 2014 Elsevier B.V. All rights reserved.