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个人信息Personal Information
教授
博士生导师
硕士生导师
性别:女
毕业院校:东北大学
学位:博士
所在单位:机械工程学院
学科:机械制造及其自动化. 微机电工程. 机械电子工程
办公地点:西部校区机械学院新大楼6009房间
电子邮箱:duliqun@dlut.edu.cn
Enhancing the Adhesion Strength Between Cu Substrate and Ni Layer in Microelectroforming
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论文类型:期刊论文
发表时间:2014-07-03
发表刊物:MATERIALS AND MANUFACTURING PROCESSES
收录刊物:SCIE、EI、Scopus
卷号:29
期号:7
页面范围:795-800
ISSN号:1042-6914
关键字:Activation; Adhesion; Current; Density; Electrochemical; Microelectroforming; Strength
摘要:Many electroforming microstructures need their substrates to be bonded with electroforming layers in micromanufacturing. A controlling current density method to improve the adhesion performance of the copper substrate to the nickel electroforming layer was presented. Lower direct current density was employed to activate the substrate. A scratch test was conducted to evaluate the adhesion strength quantitatively by observing the friction load versus the normal load and the scratch track using a digital microscope. The experimental results indicated that electrochemical activation occurred on the cathode surface with an initial current density of between 0.2 and 1.0A/dm(2). The adhesion performance of the activated substrate to the nickel layer was higher than that of a substrate without activation. While the direct current density was 0.4A/dm(2), the adhesion strength was the highest. Electrochemical activation at the beginning of microelectroforming can enhance the adhesion strength of microstructures.