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Improvement of crystal quality and UV transparence of dielectric Ga2O3 thin films via thermal annealing in N-2 atmosphere

Release Time:2022-10-03  Hits:

Date of Publication: 2022-10-03

Journal: JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS

Volume: 23

Issue: 2

Page Number: 542-545

ISSN: 0957-4522

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