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电子束注入对多晶硅Si/SiO2界面处杂质硼迁移的影响研究

Release Time:2016-08-09  Hits:

Leading Scientist: Yi Tan

Institution: 材料科学与工程学院

Project Source: 国家自然科学基金项目

Project Level: National level

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 51074032

Date of Project Approval: 2010-09-25

Scheduled Completion Time: 2013-12-31

Date of Project Initiation: 2011-01-01

Date of Project Completion: 2013-12-31

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