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多孔硅对单晶硅片电性能的影响

Release Time:2022-06-29  Hits:

Indexed by: Journal Article

Date of Publication: 2022-06-29

Journal: 人工晶体学报

Institution: 材料科学与工程学院

Volume: 42

Issue: 11

Page Number: 2363-2367

Note: 新增回溯数据

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