Current position: Home >> Scientific Research >> Paper Publications

New method of boron removal from silicon by electron beam injection

Release Time:2022-10-07  Hits:

Date of Publication: 2022-10-07

Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Institution: 材料科学与工程学院

Volume: 18

Issue: 2

Page Number: 42-45

Prev One:Numerical simulation for parameter optimization of silicon purification by electron beam melting

Next One:New method for boron removal from silicon by electron beam injection
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep