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New method of boron removal from silicon by electron beam injection

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Date of Publication:2022-10-07

Journal:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Affiliation of Author(s):材料科学与工程学院

Volume:18

Issue:2

Page Number:42-45

Pre One:Numerical simulation for parameter optimization of silicon purification by electron beam melting

Next One:New method for boron removal from silicon by electron beam injection
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