Current position: Home >> Scientific Research >> Patents

一种电子束梯度熔炼提纯多晶硅的方法

Hits:

Disigner of the Invention:jiangdachuan,董伟,顾正,邹瑞洵,Yi Tan

Affilication of Author(s):材料科学与工程学院

Application Date:2010-08-02

Application Number:201010247815.1

Authorization Date:2012-02-15

Pre One:一种去除工业硅中硼的方法

Next One:采用电子束注入去除多晶硅中杂质硼的方法