Current position: Home >> Scientific Research >> Patents

去除多晶硅中硼的方法

Hits:

First Author:lijiayan

Disigner of the Invention:Yi Tan,李亚琼,王登科,张磊

Affilication of Author(s):材料科学与工程学院

Application Number:CN103318894A

Authorization number:CN201310262432.5

Pre One:一种高纯多晶硅溅射靶材及其制备方法和应用

Next One:一种提高镍基高温合金纯净度的方法