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一种降低电子束熔炼多晶硅能耗的装置与方法

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First Author:jiangdachuan

Disigner of the Invention:王登科,shishuang,lipengting,Yi Tan

Affilication of Author(s):材料科学与工程学院

Application Number:CN104528734A

Authorization number:CN201410834688.3

Pre One:一种定向凝固造渣精炼提纯多晶硅的方法

Next One:采用电子束注入去除硅中杂质硼的方法
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