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一种降低电子束熔炼多晶硅能耗的装置与方法

Release Time:2022-10-19  Hits:

First Author: 姜大川

Disigner of the Invention: 王登科,石爽,李鹏廷,Yi Tan

Institution: 材料科学与工程学院

Application Number: CN104528734A

Authorization Number: CN201410834688.3

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