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一种底部补偿硼元素的多晶硅铸锭工艺

Release Time:2022-10-20  Hits:

First Author: 李鹏廷

Disigner of the Invention: 姜大川,李佳艳,任世强,Yi Tan,石爽

Institution: 材料科学与工程学院

Application Number: CN103849931A

Authorization Number: CN201410123650.5

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