Current position: Home >> Scientific Research >> Patents

溅射靶材用硅锆合金的制备方法

Release Time:2022-10-20  Hits:

First Author: 李鹏廷

Disigner of the Invention: 王凯,任世强,Yi Tan,姜大川

Institution: 材料科学与工程学院

Application Number: CN106367625A

Authorization Number: CN201610707859.5

Prev One:一种硼元素均匀分布的多晶硅铸锭工艺

Next One:一种底部补偿硼元素的多晶硅铸锭工艺