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一种铝硼母合金掺杂制备多晶硅靶材的铸造工艺

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First Author:lipengting

Disigner of the Invention:renshijiang,Yi Tan,王凯,jiangdachuan

Affilication of Author(s):材料科学与工程学院

Application Number:CN106149050A

Authorization number:CN201610594698.3

Pre One:一种两步生长制备无孵化层微晶硅薄膜的方法

Next One:一种硼元素均匀分布的多晶硅铸锭工艺
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