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一种铝硼母合金掺杂制备多晶硅靶材的铸造工艺

Release Time:2022-10-20  Hits:

First Author: 李鹏廷

Disigner of the Invention: 任世强,Yi Tan,王凯,姜大川

Institution: 材料科学与工程学院

Application Number: CN106149050A

Authorization Number: CN201610594698.3

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