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一种两步生长制备无孵化层微晶硅薄膜的方法

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First Author:John Wu

Disigner of the Invention:岳红云,litingju,Lin Guoqiang,Yi Tan

Affilication of Author(s):材料科学与工程学院

Application Number:CN102492933A

Authorization number:CN201110422212.5

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