一种两步生长制备无孵化层微晶硅薄膜的方法
Release Time:2022-10-20 Hits:
First Author: John Wu
Disigner of the Invention: 岳红云,李廷举,Lin Guoqiang,Yi Tan
Institution: 材料科学与工程学院
Application Number: CN102492933A
Authorization Number: CN201110422212.5
Release Time:2022-10-20 Hits:
First Author: John Wu
Disigner of the Invention: 岳红云,李廷举,Lin Guoqiang,Yi Tan
Institution: 材料科学与工程学院
Application Number: CN102492933A
Authorization Number: CN201110422212.5