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一种底部气冷的多晶硅半熔铸锭装置及工艺

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First Author:jiangdachuan

Disigner of the Invention:lijiayan,Yi Tan,lipengting,renshijiang

Affilication of Author(s):材料科学与工程学院

Application Number:CN104131345A

Authorization number:CN201410342848.2

Pre One:局部蒸发去除多晶硅中硼的方法及装置

Next One:去除多晶硅中杂质磷和金属杂质的方法及装置
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