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去除多晶硅中杂质磷和金属杂质的方法及装置

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First Author:Yi Tan

Disigner of the Invention:李国斌,jiangdachuan,xufumin,王强

Affilication of Author(s):材料科学与工程学院

Application Number:CN101289188

Authorization number:CN200810011631.8

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