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Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

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Indexed by:期刊论文

Date of Publication:2011-01-01

Journal:Thin Solid Film

Volume:519

Issue:0

Page Number:6990-6993

Pre One:Breakdown mechanism of an atmospheric-pressure radio-frequency capacitive argon discharge in parallel-plate bare metal electrodes

Next One:A Bulky Jetlike Glow Plasma Generated at Approximate Atmospheric Pressure
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