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Breakdown mechanism of an atmospheric-pressure radio-frequency capacitive argon discharge in parallel-plate bare metal electrodes

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Indexed by:期刊论文

Date of Publication:2011-01-17

Journal:PHYSICS LETTERS A

Included Journals:SCIE

Volume:375

Issue:3

Page Number:598-600

ISSN No.:0375-9601

Key Words:Electric breakdown; Atmospheric pressure; Radio-frequency

Abstract:The breakdown behavior of an atmospheric-pressure radio-frequency capacitively coupled argon plasma discharge at 13.56 MHz is investigated in order to produce a stable and homogeneous atmospheric-pressure argon glow discharge. It is found that the electrode separation distance plays a pivotal role in exciting argon discharge whether in mobility-controlled electric breakdown or in diffusion-controlled breakdown and the discharge mode (arc discharge, alpha-mode glow discharge, or gamma-mode glow discharge) immediately following breakdown is closely related to the breakdown mechanism. (C) 2010 Elsevier B.V. All rights reserved.

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