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Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma

Release Time:2024-07-05  Hits:

Date of Publication: 2022-10-07

Journal: 纳米研究 英文版

Volume: 11

Issue: 3

Page Number: 1470-1481

ISSN: 1998-0124

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