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Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma

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Date of Publication:2022-10-07

Journal:纳米研究 英文版

Volume:11

Issue:3

Page Number:1470-1481

ISSN No.:1998-0124

Pre One:Optical diagnosis of an argon/oxygen needle plasma generated at atmospheric pressure

Next One:Role of Discharge Tube in Determination of Operating Mode in Waveguide-Based Atmospheric-Pressure Microwave-Induced Plasma
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