Release Time:2024-07-05 Hits:
Date of Publication: 2022-10-07
Journal: APPLIED PHYSICS LETTERS
Institution: 物理学院
Volume: 94
Issue: 11
ISSN: 0003-6951
Prev One:Mode coexistence in radio frequency capacitive discharge of flowing argon at atmospheric pressure with bare perforated electrodes
Next One:Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma