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Date of Publication:2022-10-07
Journal:APPLIED PHYSICS LETTERS
Affiliation of Author(s):物理学院
Volume:94
Issue:11
ISSN No.:0003-6951
Pre One:Mode coexistence in radio frequency capacitive discharge of flowing argon at atmospheric pressure with bare perforated electrodes
Next One:Optical emission spectroscopy diagnosis of energetic Ar ions in synthesis of SiC polytypes by DC arc discharge plasma
