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一种电热驱动微结构的制作方法

Release Time:2022-10-19  Hits:

First Author: 杜立群

Disigner of the Invention: 贾胜芳,李永辉,Chong Liu,刘军山,徐征

Institution: 机械工程学院

Application Number: CN101814866A

Authorization Number: CN201010149262.6

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