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一种提高微电铸器件尺寸精度的超声处理方法

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First Author:duliqun

Disigner of the Invention:张本状,王启佳,Chong Liu,xuzheng,liujunshan

Affilication of Author(s):机械工程学院

Application Number:CN101812705A

Authorization number:CN201010133989.5

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