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一种提高微电铸器件尺寸精度的超声处理方法

Release Time:2022-10-19  Hits:

First Author: 杜立群

Disigner of the Invention: 张本状,王启佳,Chong Liu,徐征,刘军山

Institution: 机械工程学院

Application Number: CN101812705A

Authorization Number: CN201010133989.5

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